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Microstructural and Electrical Properties of (WO3)1-x(MoO3)x Thin Films Synthesized by Spray Pyrolysis Technique

Akl AA, Aly SA and Kaid MA

New composite oxides of (WO3)1-x(MoO3)x thin films were deposited by spray pyrolysis method. Microstructural and electrical properties of the films as-deposited and after annealing at different MoO3 concentrations were investigated. XRD analysis, as-deposited films were amorphous, but after annealing, the crystallinity of WO3 and MoO3 were improved with a hexagonal structure with an increase in the MoO3, consisted of three non-stiochiometric phases, which have a monoclinic structure. Microstructure of a mixture based on the proportion of MoO3 in the film. The electrical conductivity mechanisms appear to have two behaviors; extrinsic and intrinsic conductivities at lower and higher temperatures, respectively.