抽象的

A Review of Different Etching Methodologies and Impact of various etchants in Wet Etching in Micro Fabrication

Benjamin. J, Grace Jency. J, Vijila. G

The concept of miniaturization was introduced because of advancement in science and technology during 1980s. These miniaturized structures and designs are of high significance for making up with the macroscopic technology, for the sake of interfacing with microscopic world. The fabrication of micro structures and designs which are the advanced applications of micro fabrication are used for the process of micromachining structures in three dimensions as it is essential for interfacing with the nanotechnology. Micromachining which means performing cutting or grinding operations or selective removal of wafer to produce various structures has much important applications like accelerometers which are used to trigger air bags in cars. The lithography and etching processes are used to shape the bulk materials into microstructures in micro fabrication mechanism. Different ion bombardment techniques and chemical reactive mechanisms are used for a type of etching which is carried out in vacuum chamber, whereas chemical solutions are used for another type of etching mechanism whose procedures are finished in a bath. This survey illustrates different etching methodologies and the impact of various etchants in wet etching.